بررسی تاثیر ناهمواری بر خصوصیات تونل زنی و آماری تانتالوم کاشت شده با استفاده از یون نیتروژن

نوع مقاله : علمی و پژوهشی

نویسندگان

گروه فیزیک، واحد تهران غرب، دانشگاه آزاد اسلامی، تهران.

چکیده

در این مقاله، اثر نوع یون بر خصوصیات ترابردی از میان ساختارهایی که فصول مشترک آنها توسط فرآیند بمباران یون بر پایه تانتالوم ایجاد گردیده، بررسی شده است. یون نیتروژن استفاده شده در فرآیند کاشت یونی با انرژی 30 کیلوالکترون ولت و در دوزهای مختلف در دمای محیط در نظر گرفته شده اند.برای مطالعه ریخت شناسی سطوح لایه های نازک بمبارانه شده یونی، از آنالیز میکروسکوپ نیروی اتمی (AFM) استفاده شده و مقدار متوسط ناهمواری تعیین شده است. نتایج نشان می دهد که فصول مشترکی هایی که با بمباران یون نیتروژن تولید شده اند تاثیرات بیشتری بر خصوصیات ترابردی دارند. همچنین نسبت پیک به دره کاهش می یابد. علاوه بر این، با افزایش دوز یون نیتروژن، چگالی جریان به عنوان تابعی از ولتاژ کاهش یافته است هرچند این کاهش، نتیجه مستقیمی از پراکندگی ناشی از وجود ناهمواریست اما روند این کاهش برای دوزهای مختلف از نظم خاصی پیروی نمی‌کند، نمونه شماره یک مفدار احتمال عبور بیشتری را نشان می‌دهد. نتایج نشان می‌دهند که تعیین میزان دوز در تعیین مقدار خصوصیات ترابردی از میان لایه های نازک ناهموار نقشی مهم ایفا می‌کند.

کلیدواژه‌ها

موضوعات

عنوان مقاله [English]

Investigating the effect of roughness on the tunneling and statistical properties of tantalum thin layers grown using nitrogen ions

نویسندگان [English]

  • amir hoshang ramezani
  • Zhaleh Ebrahiminejad
Department of Physics, West Tehran Branch, Islamic Azad University, Tehran, Iran.
چکیده [English]

In this article, the effect of ion type on the transport properties of the structures whose common phases were created by the tantalum-based ion bombardment process has been investigated. The nitrogen ions used in the ion seeding process are considered with an energy of 30 kV and in different doses at ambient temperature. To study the morphology of the surfaces of ion bombarded thin layers, atomic force microscope (AFM) analysis was used and the amount Average roughness is determined. The results show that the common seasons produced by nitrogen ion bombardment have more effects on the transport characteristics. Also, the peak-to-valley ratio decreases. In addition, with the increase of the nitrogen ion dose, the current density has decreased as a function of the voltage, although this decrease is a direct result of the dispersion caused by the existence of unevenness, but the process of this decrease does not follow a specific order for different doses, example sample number one indicates a higher probability of passing. The results show that determining the amount of dose plays an important role in determining the amount of transport characteristics through uneven thin layers.

کلیدواژه‌ها [English]

  • Interfacial
  • Roughness
  • Statistical
  • Tantalum

مراجع

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