Modeling the Effect of the Most Important Factors on the Kinetics Behavior of Silicon Nitration Reaction Based on Group Method of Data Handling

Document Type : Original Articles

Authors

1 , School of Metallurgy and Materials Engineering, Iran University of Science and Technology.

2 School of Metallurgy and Materials Engineering, Iran University of Science and Technology.

3 School of Metallurgy and Materials Engineering, Iran University of Science and Technology

Abstract

In the present study, a soft computing method namely the group method of data handling (GMDH) is applied to develop a new and efficient predictive model for prediction of kinetics   silicon nitridation. 1186 data point is obtained from experimental results and other studies in literatures. Several effective parameters like time, temperature, nitrogen percentage, pellet size and silicon particle size are considered. The silicon nitridation was performed in 1573 k and results were evaluated against model results for validation of the model. The performance of the model is evaluated through statistical analysis. Furthermore, the performance and efficiency of the GMDH model is confirmed against the two most common analytical models. Using sensitivity analysis, nitrogen pressure with  0.27 was the most effective parameter in nitridation.

Keywords

References

  1. Yigiterol, F., Güllü, H. H., Bayraklı, Ö., and Yıldız, D. E., "Temperature-Dependent Electrical Characteristics of Au/Si3N4/4H n-SiC MIS Diode", Journal of Electronic Materials, Vol. 47, (5), pp.2979-2987, (2018).
  2. Vieira, E. M. F., Ribeiro, J. F., Sousa, R., Silva, M. M., Dupont, L., and Gonçalves, L. M., "Titanium Oxide Adhesion Layer for High Temperature Annealed Si/Si3N4/TiOx/Pt/LiCoO2 Battery Structures", Journal of Electronic Materials, Vol. 45, NO. 2, pp. 910-916, (2016).
  3. Torchynska, T., Khomenkova, L., and Slaoui, A., "Modification of Light Emission in Si-Rich Silicon Nitride Films Versus Stoichiometry and Excitation Light Energy", Journal of Electronic Materials, Vol. 47, NO. 7, pp. 3927-3933, (2018).
  4. Lu, Y., Yang, J., Lu, W., Liu, R., Qiao, G., and Bao, C., "Synthesis of Porous Silicon Nitride Ceramics from Diatomite", Materials and Manufacturing Processes, Vol. 25, NO. 9, pp. 998-1000, (2010).
  5. Zhang, XH., Chen, GY., An, WK., Deng, ZH., Liu, W., and Yang, C., "Experimental Study of Machining Characteristics in Laser Induced Wet Grinding Silicon Nitride", Materials and Manufacturing Processes, Vol. 29, NO. 11-12, pp. 1477-1482, (2014).
  6. Somiya, S., Mitomo, M., and Yoshimura, M. "SILICON NITRIDE - I Ceramic Research and Development in Japan, Vol. 1", Materials and Manufacturing Processes, Vol. 6, NO. 4, pp. 741-744, (1991).
  7. Carter, R. E., "Kinetic Model for Solid‐State Reactions", The Journal of Chemical Physics, Vol. 34, NO. 6, pp. 2010-2015, (1961).
  8. Li, WB., Lei, B. Q., and Lindbäck, T., "A kinetic model for reaction bonding process of silicon powder compact", Journal of the European Ceramic Society, Vol. 17, NO. 9, pp. 1119-1131, (1997).
  9. Chang, F. W., Liou, T-H. H., and Tsai, F. M., "The nitridation kinetics of silicon powder compacts", Thermochimica Acta, Vol. 354, NO. 1-2, pp. 71-80, (2000).
  10. Wang, X-S., Zhai, G., Yang, J., et al. "Nitridation of Si",. Surface Science, Vol. 494, NO. 2, pp. 83-94, (2001).
  11. Hara, Y., Shimizu, T., and Shingubara, S., "Nitridation of silicon by nitrogen neutral beam", Applied Surface Science, Vol. 363, pp. 555-559, (2016).
  12. Hyuga, H., Zhou, Y., Kusano, D., Hiroa, K., and Kita, H., "Nitridation behaviors of silicon powder doped with various rare earth oxides", Journal of the Ceramic Society of Japan, Vol. 119, pp. 251-253, (2011).
  13. Li, Y., Wang, L., Yin, S., et al. " Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration: Study on Nitridation of Silicon Added with Amorphous Silicon Nitride", ASME, New York, pp. 435-438, (2011).
  14. Zhu, X., Zhou, Y., Hirao, K., and Lenčéš, Z., "Processing and Thermal Conductivity of Sintered Reaction-Bonded Silicon Nitride. I: Effect of Si Powder Characteristics", Journal of the American Ceramic Society, Vol. 89, NO. 11, pp. 3331-3339, (2006).
  15. Kim, M., Park, J., Lee, H-W., and Kang, S., "A cyclic process for the nitridation of Si powder", Materials Science and Engineering: A, Vol. 408, NO. 1-2, pp. 85-91, (2005).
  16. Ishida, M., and Wen, CY., "Comparison of zone-reaction model and unreacted-core shrinking model in solid—gas reactions—I isothermal analysis", Chemical Engineering Science, Vol. 26, NO. 7, pp.1031-1041, (1971).
  17. Bhatia, S. K., "Analysis of distributed pore closure in gas-solid reactions", AIChE Journal, Vol. 31, NO. 4, pp. 642-648, (1985).
  18. Ishida, M., Wen, C Y. Y., and Shirai, T., "Comparison of zone-reaction model and unreacted-core shrinking model in solid—gas reactions—II non-isothermal analysis", Chemical Engineering Science, Vol. 26, NO. 7, pp. 1031-1048, (1971).
  19. Szekely, J., and Evans, J. W., "A structural model for gas—solid reactions with a moving boundary", Chemical Engineering Science, Vol. 25, NO. 6, pp. 1091-1107, (1970).
  20. Ku, W., Gregory, O. J., and Jennings, H. M., "Computer Simulation of the Microstructure Developed in Reaction-Sintered Silicon Nitride Ceramics", Journal of the American Ceramic Society, Vol. 73, NO. 2, pp. 286-296, (1990).
  21. Dervisbegovic, H., and Riley, F. L., "The influence of iron and hydrogen in the nitridation of silicon", Journal of Materials Science, Vol. 14, NO. 5, pp. 1265-1268, (1979).
  22. Maleki, E., and Maleki, N., "Artificial Neural Network Modeling of Pt/C Cathode Degradation in PEM Fuel Cells", Journal of Electronic Materials, Vol. 45, NO. 8, pp. 3822-3834, (2016).
  23. Vafaeenezhad, H., Seyedein, S. H., Aboutalebi, M. R., and Eivani, A. R., "Incorporating the Johnson–Cook Constitutive Model and a Soft Computational Approach for Predicting the High-Temperature Flow Behavior of Sn-5Sb Solder Alloy: A Comparative Study for Processing Map Development", Journal of Electronic Materials, Vol. 46, NO. 1, pp. 467-477, (2017).
  24. Derebasi, N., Eltez, M., Guldiken, F., Sever, A., Kallis, K., and Kilic, H., "Influence of Geometrical Factors on Performance of Thermoelectric Material Using Numerical Methods", Journal of Electronic Materials, Vol. 44, NO. 6, pp. 2068-2073, (2015).
  25. Reddy, N. S., Panigrahi, B. B., Ho, C. M., Kim, J. H., and Lee, C. S., "Artificial neural network modeling on the relative importance of alloying elements and heat treatment temperature to the stability of α and β phase in titanium alloys", Computational Materials Science, Vol. 107, pp.175-183, (2015).
  26. Ivakhnenko, A. G., "Polynomial Theory of Complex Systems", IEEE Transactions on Systems, Man, and Cybernetics, Vol. SMC-1, NO. 4, pp. 364-378, (1971).
  27. Ivakhnenko, A. G., Ivakhnenko, G. A., and G. A., Ivakhnenko, A. G. I., "Problems of further development of the group method of data handling algorithms. Part I", PATTERN Recognit IMAGE Anal, Vol. 10, NO. 2, pp.187-194, (2000).
  28. Kaveh, A., Bakhshpoori, T., and Hamze-Ziabari, S. M., "Derivation of New Equations for Prediction of Principal Ground-Motion Parameters using M5′ Algorithm", Journal of Earthquake Engineering, Vol. 20, NO. 6, pp. 910-930, (2016).
  29. Smith, G. N. N., "Probability and Statistics in Civil Engineering", Collins, London, pp. 269-284, (1986).
  30. Kaveh, A., Hamze-Ziabari, S. M., and Bakhshpoori, T., "Patient rule-induction method for liquefaction potential assessment based on CPT data", Bulletin of Engineering Geology and the Environment, Vol. 77, NO. 2, pp. 849-865, (2018).
  31. Karakuş, N., Kurt, A. O., and Toplan, H. Ö., "Production of Sinterable Si3N4 from SiO2 -Li2 O-Y2O3 Mixture", Materials and Manufacturing Processes, Vol. 27, NO. 7, pp.797-801, (2012).
  32. Pigeon, R. G., and Varma, A., "Quantitative kinetic analysis of silicon nitridation", Journal of Materials Science, Vol. 28, NO. 11, pp.2999-3013, (1993).
  33. Hughes, G. S., Mcgreavy, C., and Merkin, J. H., "Transport effects in the manufacture of reaction-bonded silicon nitride", The Canadian Journal of Chemical Engineering, Vol. 57, NO. 2, pp. 198-202, (1979).
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Journal Of Metallurgical and Materials Engineering
Volume 32, Issue 2 - Serial Number 24
ُSpring & Summer
June 2021
Pages 27-44

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