مدل‌سازی اثر مهم‌ترین عوامل مؤثر بر رفتار سینتیکی واکنش نیتریده‌کردن سیلیسیم به روش پیوند واکنشی بر اساس روش گروهی بررسی داده

نوع مقاله : علمی و پژوهشی

نویسندگان

1 دانشکده مهندسی مواد، دانشگاه علم و صنعت ایران.

2 ، دانشکده مهندسی مواد، دانشگاه علم و صنعت ایران.

3 دانشکده مهندسی مواد، دانشگاه علم و صنعت ایران

چکیده

در مطالعه حاضر با استفاده از روش محاسباتی به نام بررسی گروهی داده (group method of data handling) مدل مؤثر برای پیش‌بینی میزان پیشروی واکنش نیتریدهکردن سیلیسیم بهروش پیوند واکنشی، توسعه داده شده است. 2186 داده از آزمایش‌‌‌های انجامشده در این تحقیق و اطلاعات موجود در کار‌‌های گذشته استخراج شده است. تأثیرات مهم‌ترین پارامتر‌‌ها مثل زمان، دما، درصد گاز نیتروژن، اندازۀ قرص و اندازۀ ذرۀ سیلیسیم اولیه بررسی شده است. واکنش نیتریده‌کردن سیلیسیم در دمای 1573 درجه کلوین انجام شد و نتایج آزمایش با مقادیر حاصل از مدل مقایسه و با استفاده از پارامترهای خطای آماری عملکرد مدل با خطای 96/0 تأیید شد. همچنین عملکرد دقیق و مؤثر مدل GMDH در برابر مدل‌‌‌های تحلیلی قبلی مقایسه شد. با استفاده از آنالیز حساسیت، فشار نیتروژن با مقدار 27/0 مؤثرترین پارامتر در میزان نیتریده‌شدن تعیین شد.

کلیدواژه‌ها


عنوان مقاله [English]

Modeling the Effect of the Most Important Factors on the Kinetics Behavior of Silicon Nitration Reaction Based on Group Method of Data Handling

نویسندگان [English]

  • Ehsan Shahmohamadi 1
  • frahad golestanifard 2
  • Ali reza Mirhabibi 3
1 , School of Metallurgy and Materials Engineering, Iran University of Science and Technology.
2 School of Metallurgy and Materials Engineering, Iran University of Science and Technology.
3 School of Metallurgy and Materials Engineering, Iran University of Science and Technology
چکیده [English]

In the present study, a soft computing method namely the group method of data handling (GMDH) is applied to develop a new and efficient predictive model for prediction of kinetics   silicon nitridation. 1186 data point is obtained from experimental results and other studies in literatures. Several effective parameters like time, temperature, nitrogen percentage, pellet size and silicon particle size are considered. The silicon nitridation was performed in 1573 k and results were evaluated against model results for validation of the model. The performance of the model is evaluated through statistical analysis. Furthermore, the performance and efficiency of the GMDH model is confirmed against the two most common analytical models. Using sensitivity analysis, nitrogen pressure with  0.27 was the most effective parameter in nitridation.

کلیدواژه‌ها [English]

  • Ceramics
  • Modeling
  • Silicon nitriding
  • Programming
  • kinetics
  • pattern
  • Regression
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