مهندسی متالورژی و مواد

مهندسی متالورژی و مواد

بررسی تأثیر دمای بازپخت بر خواص اپتیکی و ریزساختار لایه‌های نازک فریت نیکل-روی رشدیافته با روش کندوپاش مگنترونی

نوع مقاله : علمی و پژوهشی

نویسندگان
محسن عبداللهی
محمد حسین شمس
محمد حسین حسینی
مجتمع دانشگاهی الکترومغناطیس، دانشگاه صنعتی مالک اشتر.
10.22067/jmme.2026.97057.1230
چکیده
لایه‌ نازک‌های فریت ‏نیکل-روی‏ (NZF) رشد یافته بر روی زیرلایه تک بلور ‏سیلیکون‏ و شیشه با استفاده از کندوپاش مگنترون RF تولید شدند. ‏ ‏آزمون‌های XRD‏ ، FE-SEM‏ ، ‏AFM‏ ، UV-vis و ‏VSM‏ برای تعیین ترکیب فازی و توپوگرافی سطح به همراه خواص اپتیکی و مغناطیسی لایه‌های نازک فریت ‏NZF‏ انجام ‏شد. تمامی نمونه‌ها دارای ساختار اسپینل بوده و میانگین ابعاد بلورک‌ها که با افزایش دمای بازپخت، رشد نشان داده‌اند در محدوده 19-31 نانومتر می‌باشند. بررسی‌های اپتیکی با استفاده از طیف‌سنجی فرابنفش-مرئی نشان داد که با افزایش دمای بازپخت، عبور نور در محدوده مرئی افزایش یافته است. همچنین، تصاویر FE-SEM و AFM نشان‌دهنده روند افزایشی در اندازه دانه‌ها (از 32 تا 42 نانومتر) با افزایش دمای بازپخت و کاهش زبری سطح بودند که هر دو می‌توانند بر ویژگی‌های نوری لایه‌ها تأثیرگذار باشند. این تغییرات ساختاری هم‌راستا با رفتار اپتیکی لایه‌ها بوده و در کاهش پراکندگی نور و بهبود شفافیت مؤثرند. ارزیابی میکروسکوپ نیروی اتمی لایه‌های نازک بازپخت شده طبق آزمایش‌های پروفیلومتری، ارتفاع ‏رسوب‌گذاری را 198 نانومتر نشان می‌دهد و موید داده‌های FE-SEM می‌باشد. ارزیابی مغناطیسی لایه‌های نازک ‏NZF/Si‏ نشان‌ از افزایش مقادیر ‏MS‏ از 42 به emu/g59 و کاهش مقادیر ‏HC‏ از ‏‏98 به Oe50 با افزایش دمای بازپخت، از 700 به ℃900، می‌باشد. این نتایج حاکی از آن است که با بهینه‌سازی دمای بازپخت، لایه‌های NZF علاوه بر بهبود خواص مغناطیسی نرم، ویژگی‌های اپتیکی مناسبی پیدا می‌کنند که کاربرد آن‌ها را در افزاره‌های مغناطیسی-اپتیکی و فناوری‌های بسامد بالا تسهیل می‌سازد.
کلیدواژه‌ها
فریت نیکل-روی
لایه نازک
کندوپاش مگنترونی
ریز ساختار
خواص اپتیکی
موضوعات

عنوان مقاله English

Investigation of the Effect of Annealing Temperature on the Optical Properties and Microstructure of Nickel-Zinc Ferrite Thin Films Grown by Magnetron Sputtering

نویسندگان English

Mohsen Abdollahi
Mohammad Hossein Shams
Mohammad Hossein Hosseini
Faculty of Electromagnetics, Malek Ashtar University of Technology, Tehran, Iran
چکیده English

Nickel-zinc ferrite (NZF) thin films grown on single-crystal silicon and glass substrates were produced using RF magnetron sputtering. XRD, FE-SEM, AFM, UV-vis, and VSM tests were performed to determine the phase composition and surface topography, along with the optical and magnetic properties of the NZF ferrite thin films. All samples had a spinel structure, and the average crystallite sizes, which showed growth with increasing annealing temperature, ranged from 19-31 nm. Optical investigations using UV-visible spectroscopy showed that light transmittance in the visible range increased with increasing annealing temperature. Also, FE-SEM and AFM images showed an increasing trend in grain size (from 32 to 42nm) with increasing annealing temperature and a decrease in surface roughness, both of which can affect the optical properties of the films. These structural changes were consistent with the optical behavior of the films and were effective in reducing light scattering and improving transparency. Atomic force microscopy evaluation of the annealed thin films, according to profilometry tests, showed a deposition height of 198 nm, confirming the FE-SEM data. Magnetic evaluation of the NZF/Si thin films showed an increase in MS values from 42 to 59 emu/g and a decrease in HC values from 98 to 50 Oe with increasing annealing temperature, from 700 to 900 °C. These results indicate that by optimizing the annealing temperature, NZF films not only improve their soft magnetic properties but also acquire suitable optical characteristics, facilitating their application in magneto-optical devices and high-frequency technologies.

کلیدواژه‌ها English

Nickel-zinc ferrite
Thin film
Magnetron sputtering
Microstructure
Optical properties
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